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NORD-pie - Piezoelectric micro-electromechanical systems for Nordic industry
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2010 (English)Book (Other (popular science, discussion, etc.))
Abstract [en]

NORD-pie will form the basis for a qualified piezo-MEMS service including feasibility studies, design and production. The project will demonstrate the availability of small scale and high quality industrial fabrication of piezoelectric MEMS devices in the Nordic countries. NORD-pie aims to provide piezoelectric thin film technology to Nordic industry
Place, publisher, year, edition, pages
Copenhagen: Nordic Council of Ministers , 2010. , p. 60
Keywords [en]
Micro electromechanical system, piezoelectric, miniaturization
Identifiers
URN: urn:nbn:se:norden:org:diva-2803OAI: oai:DiVA.org:norden-2803DiVA, id: diva2:707173
Available from: 2014-03-24 Created: 2014-03-24

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fulltext(4352 kB)852 downloads
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